S9682 and s9683 are si photodiodes specifically designed to detect vuv (vacuum ultraviolet) radiation with high reliability. th ese photodiodes are hermetically sealed in a metal package with a quartz window. there is no outgassing from the inside of the package, elimina ting the cause of decrease in vuv sensitivity. features l highly stable sensitivity and dark current against arf excimer laser radiation ( =193 nm) l hermetically sealed metal package with quartz window l large active area: S9682: 5.8 5.8 mm (to-8 metal package) s9683: 10 10 mm (1 inch metal package) applications l arf excimer laser detection l uv detection photodiode si photodiode highly reliable photodiode for vuv detection S9682, s9683 1 absolute maximum ratings (ta=25 c) parameter symbol value unit reverse voltage v r max. 5 v operating temperature topr -40 to +100 c storage temperature tstg -55 to +125 c electrical and optical characteristics (ta=25 c) S9682 s9683 parameter symbol condition min. typ. max. min. typ. max. unit spectral response range - 193 to 1000 -- 193 to 1000 -nm peak sensitivity wavelength p - 760 - - 760 - nm photo sensitivity s =193 nm 45 60 - 45 60 - ma/w dark current i d v r =10 mv - 0.02 0.5 - 0.05 1.0 na terminal capacitance ct v r =0 v, f=10 khz - 1.0 - - 4.0 - nf rise time tr v r =0 v, r l =1 k ? 10 to 90 % - 2 - - 9 - s
si photodiode S9682, s9683 2 variation in sensitivity due to vuv exposure kspda0165ec dimensional outlines (unit: mm) S9682 s9683 kspda0166ea conventional type S9682, s9683 relative sensitivity (%) number of shot [typ. arf excimer laser, 0.1 mj/cm 2 /pulse, f=100 hz, =193 nm, pulse width=15 ns (fwhm)] 5 10 6 1 10 6 0 1 10 7 40 20 60 80 100 120 kspdb0254ea y 13.9 0.2 12.35 0.1 9.1 0.1 x 0.085 active area 5.8 5.8 2.0 (15.0) 4.5 0.2 0.5 max. photosensitive surface quartz window 0.45 lead 7.5 0.2 center of active area relative to center of cap -0.485 x +0.315 -0.4 y +0.4 anode terminal mark 1.4 common to case 42.0 0.3 34.0 0.2 window 16.0 0.2 (2 ) 4 7.1 0.3 19 0.5 quartz window (t=1.0) photosensitive surface 7.62 0.2 (1.9) ( 24.5) 27.4 0.2 common to case active area 10 10
si photodiode S9682, s9683 hamamatsu photonics k.k., solid state division 1126-1 ichino-cho, higashi-ku, hamamatsu city, 435-8558 japan, telephone: (81) 53-434-3311, fax: (81) 53-434-5184, www.hamamats u.com u.s.a.: hamamatsu corporation: 360 foothill road, p.o.box 6910, bridgewater, n.j. 08807-0910, u.s.a., telephone: (1) 908-231-0 960, fax: (1) 908-231-1218 germany: hamamatsu photonics deutschland gmbh: arzbergerstr. 10, d-82211 herrsching am ammersee, germany, telephone: (49) 8152- 375-0, fax: (49) 8152-265-8 france: hamamatsu photonics france s.a.r.l.: 19, rue du saule trapu, parc du moulin de massy, 91882 massy cedex, france, teleph one: 33-(1) 69 53 71 00, fax: 33-(1) 69 53 71 10 united kingdom: hamamatsu photonics uk limited: 2 howard court, 10 tewin road, welwyn garden city, hertfordshire al7 1bw, unit ed kingdom, telephone: (44) 1707-294888, fax: (44) 1707-325777 north europe: hamamatsu photonics norden ab: smidesv ? gen 12, se-171 41 solna, sweden, telephone: (46) 8-509-031-00, fax: (46) 8-509-031-01 italy: hamamatsu photonics italia s.r.l.: strada della moia, 1 int. 6, 20020 arese, (milano), italy, telephone: (39) 02-935-81 -733, fax: (39) 02-935-81-741 information described in this material is current as of june, 2011. product specifications are subject to change without prior notice due to improvements or other reasons. before assembly into final products, please contact us for the delivery specification sheet to check the latest information. type numbers of products listed in the delivery specification sheets or supplied as samples may have a suffix "(x)" which means preliminary specifications or a suffix "(z)" which means developmental specifications. the product warranty is valid for one year after delivery and is limited to product repair or replacement for defects discovere d and reported to us within that one year period. however, even if within the warranty period we accept absolutely no liability for any loss caused by natural disasters or improper product use. copying or reprinting the contents described in this material in whole or in part is prohibited without our prior permission. cat. no. kspd1069e03 jun. 2011 dn 3
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